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yobo体育app:Innovative plasma processing for opening new industry

发布时间:2019-10-24 

Hajime SAKAKITA
"Innovative plasma processing for opening new industry"
Abstract:
For contributing achievement of a safe and secure super-aging society, we have pursued R&D of innovative energy-saving and low environmental impact electronic devices through advanced plasma process technology. In the presentation, I will show novel processing technologies for the production such as nitrides and carbon materials, and for life sciences.

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